Mathematical modeling of nanomachining with atomic force microscope cantilevers
نویسندگان
چکیده
منابع مشابه
Calibration of rectangular atomic force microscope cantilevers
A method to determine the spring constant of a rectangular atomic force microscope cantilever is proposed that relies solely on the measurement of the resonant frequency and quality factor of the cantilever in fluid ~typically air!, and knowledge of its plan view dimensions. This method gives very good accuracy and improves upon the previous formulation by Sader et al. @Rev. Sci. Instrum. 66, 3...
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Nanomachining experiments on fused quartz surface have been performed using an atomic force microscope combined with a two-axis capacitive force/displacement transducer. The minimum normal force fnP needed to form reproducibly a groove was about 4.7 μN. The minimum critical normal force fnR, tangential force ftR, and groove depth dgR when the material removal process began were found to be 33.7...
متن کاملGDQEM Analysis for Free Vibration of V-shaped Atomic Force Microscope Cantilevers
V-shaped and triangular cantilevers are widely employed in atomic force microscope (AFM) imaging techniques due to their stability. For the design of vibration control systems of AFM cantilevers which utilize patched piezo actuators, obtaining an accurate system model is indispensable prior to acquiring the information related to natural modes. A general differential quadrature element method (...
متن کاملHigh-frequency response of atomic-force microscope cantilevers
frequency response of atomic-force microscope cantilevers" (1997). Faculty Publications from the Department of Engineering Mechanics. Paper 2. Recent advances in atomic-force microscopy have moved beyond the original quasistatic implementation into a fully dynamic regime in which the atomic-force microscope cantilever is in contact with an insonified sample. The resulting dynamical system is co...
متن کاملNormal and torsional spring constants of atomic force microscope cantilevers
Two methods commonly used to measure the normal spring constants of atomic force microscope cantilevers are the added mass method of Cleveland et al. @J. P. Cleveland et al., Rev. Sci. Instrum. 64, 403 ~1993!#, and the unloaded resonance technique of Sader et al. @J. E. Sader, J. W. M. Chon, and P. Mulvaney, Rev. Sci. Instrum. 70, 3967 ~1999!#. The added mass method involves measuring the chang...
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ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2014
ISSN: 1742-6596
DOI: 10.1088/1742-6596/490/1/012161